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Microstructure Research at the Canadian Light Source (CLS)
While the first calculator filled an entire room in 1935, modern calculators can fit into a pocket. Miniaturization of integrated circuits has enabled many modern devices such as integrated circuits, microcomputers, cell phones, heart pace makers and air bag sensors in cars. For many of these devices, fabrication is based on microlithography. At the CLS we are studying X-ray lithography, an even more advanced approach that allows fabrication of tall three-dimensional devices with even higher performance. The SyLMAND (Synchrotron Laboratory for Micro and Nano Devices) facility at the CLS is one of the world's newest laboratories devoted to research in X-ray lithography and nano-fabrication. Supporters of this facility include TRLabs and development has been guided by Professors Achenbach and Klymyshyn. Graduate students in engineering and science are invited to participate in this challenging multidisciplinary research.
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